5/19/2012	12:01:18 AM	Run aborted at 12:01 AM
5/19/2012	12:01:18 AM	Helium valve closed
5/19/2012	12:01:18 AM	H2 valve closed
5/19/2012	12:01:18 AM	BCl3 valve closed
5/19/2012	12:01:18 AM	PH3 valve closed
5/19/2012	12:01:18 AM	SiCl4 pre valve closed
5/19/2012	12:01:18 AM	SiCl4 post valve closed
5/19/2012	12:01:18 AM	Bypass valve closed
5/19/2012	12:01:18 AM	Main Vac valve closed
5/19/2012	12:01:18 AM	Bubbler valve closed
5/19/2012	12:01:18 AM	Helium MFC set to  0.000000
5/19/2012	12:01:18 AM	H2 MFC set to  0.000000
5/19/2012	12:01:18 AM	BCl3 MFC set to  0.000000
5/19/2012	12:01:18 AM	PH3 MFC set to  0.000000
5/19/2012	12:01:18 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:01:18 AM	Tube furnace set to 0
5/19/2012	12:03:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	12:03:01 AM	Recipe started at 12:03 AM
5/19/2012	12:03:01 AM	Helium valve closed
5/19/2012	12:03:01 AM	H2 valve closed
5/19/2012	12:03:01 AM	BCl3 valve closed
5/19/2012	12:03:01 AM	PH3 valve closed
5/19/2012	12:03:01 AM	SiCl4 pre valve closed
5/19/2012	12:03:01 AM	SiCl4 post valve closed
5/19/2012	12:03:01 AM	Main Vac valve closed
5/19/2012	12:03:01 AM	Bubbler valve closed
5/19/2012	12:03:01 AM	Bypass valve opened
5/19/2012	12:03:01 AM	Helium MFC set to  0.000000
5/19/2012	12:03:01 AM	H2 MFC set to  0.000000
5/19/2012	12:03:01 AM	BCl3 MFC set to  0.000000
5/19/2012	12:03:01 AM	PH3 MFC set to  0.000000
5/19/2012	12:03:01 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:03:01 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:03:01 AM	Tube furnace set to 0
5/19/2012	12:04:04 AM	Helium valve closed
5/19/2012	12:04:04 AM	H2 valve closed
5/19/2012	12:04:04 AM	BCl3 valve closed
5/19/2012	12:04:04 AM	PH3 valve closed
5/19/2012	12:04:04 AM	SiCl4 pre valve closed
5/19/2012	12:04:04 AM	SiCl4 post valve closed
5/19/2012	12:04:04 AM	Main Vac valve closed
5/19/2012	12:04:04 AM	Bubbler valve closed
5/19/2012	12:04:04 AM	Bypass valve opened
5/19/2012	12:04:04 AM	Helium MFC set to  0.000000
5/19/2012	12:04:04 AM	H2 MFC set to  0.000000
5/19/2012	12:04:04 AM	BCl3 MFC set to  0.000000
5/19/2012	12:04:04 AM	PH3 MFC set to  0.000000
5/19/2012	12:04:04 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:04:04 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:04:05 AM	Tube furnace set to 0
5/19/2012	12:05:05 AM	Helium valve closed
5/19/2012	12:05:05 AM	H2 valve closed
5/19/2012	12:05:05 AM	BCl3 valve closed
5/19/2012	12:05:05 AM	PH3 valve closed
5/19/2012	12:05:05 AM	SiCl4 pre valve closed
5/19/2012	12:05:05 AM	SiCl4 post valve closed
5/19/2012	12:05:05 AM	Bypass valve closed
5/19/2012	12:05:05 AM	Bubbler valve closed
5/19/2012	12:05:05 AM	Main Vac valve opened
5/19/2012	12:05:05 AM	Helium MFC set to  0.000000
5/19/2012	12:05:05 AM	H2 MFC set to  0.000000
5/19/2012	12:05:05 AM	BCl3 MFC set to  0.000000
5/19/2012	12:05:05 AM	PH3 MFC set to  0.000000
5/19/2012	12:05:05 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:05:05 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:05:05 AM	Tube furnace set to 0
5/19/2012	12:05:06 AM	Run finished at 12:05 AM
5/19/2012	12:05:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	12:10:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2012	12:10:02 AM	Recipe started at 12:10 AM
5/19/2012	12:10:02 AM	Helium valve closed
5/19/2012	12:10:02 AM	H2 valve closed
5/19/2012	12:10:02 AM	BCl3 valve closed
5/19/2012	12:10:02 AM	PH3 valve closed
5/19/2012	12:10:02 AM	SiCl4 pre valve closed
5/19/2012	12:10:02 AM	SiCl4 post valve closed
5/19/2012	12:10:02 AM	Main Vac valve closed
5/19/2012	12:10:02 AM	Bypass valve closed
5/19/2012	12:10:02 AM	Bubbler valve closed
5/19/2012	12:10:02 AM	Helium MFC set to  0.000000
5/19/2012	12:10:02 AM	H2 MFC set to  0.000000
5/19/2012	12:10:02 AM	BCl3 MFC set to  0.000000
5/19/2012	12:10:02 AM	PH3 MFC set to  0.000000
5/19/2012	12:10:02 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:10:02 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:10:02 AM	Tube furnace set to 0
5/19/2012	12:10:05 AM	H2 valve closed
5/19/2012	12:10:05 AM	BCl3 valve closed
5/19/2012	12:10:05 AM	PH3 valve closed
5/19/2012	12:10:05 AM	SiCl4 pre valve closed
5/19/2012	12:10:05 AM	SiCl4 post valve closed
5/19/2012	12:10:05 AM	Main Vac valve closed
5/19/2012	12:10:05 AM	Bypass valve closed
5/19/2012	12:10:05 AM	Bubbler valve closed
5/19/2012	12:10:05 AM	Helium valve opened
5/19/2012	12:10:05 AM	Helium MFC set to  500.000000
5/19/2012	12:10:05 AM	H2 MFC set to  0.000000
5/19/2012	12:10:05 AM	BCl3 MFC set to  0.000000
5/19/2012	12:10:05 AM	PH3 MFC set to  0.000000
5/19/2012	12:10:05 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:10:05 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:10:05 AM	Tube furnace set to 0
5/19/2012	12:11:17 AM	Helium valve closed
5/19/2012	12:11:17 AM	H2 valve closed
5/19/2012	12:11:17 AM	BCl3 valve closed
5/19/2012	12:11:17 AM	PH3 valve closed
5/19/2012	12:11:17 AM	SiCl4 pre valve closed
5/19/2012	12:11:17 AM	SiCl4 post valve closed
5/19/2012	12:11:17 AM	Main Vac valve closed
5/19/2012	12:11:17 AM	Bypass valve closed
5/19/2012	12:11:17 AM	Bubbler valve closed
5/19/2012	12:11:17 AM	Helium MFC set to  0.000000
5/19/2012	12:11:17 AM	H2 MFC set to  0.000000
5/19/2012	12:11:17 AM	BCl3 MFC set to  0.000000
5/19/2012	12:11:17 AM	PH3 MFC set to  0.000000
5/19/2012	12:11:17 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:11:17 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:11:17 AM	Tube furnace set to 0
5/19/2012	12:11:18 AM	Run finished at 12:11 AM
5/19/2012	12:11:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2012	12:13:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	12:13:46 AM	Recipe started at 12:13 AM
5/19/2012	12:13:46 AM	Helium valve closed
5/19/2012	12:13:46 AM	H2 valve closed
5/19/2012	12:13:46 AM	BCl3 valve closed
5/19/2012	12:13:46 AM	PH3 valve closed
5/19/2012	12:13:46 AM	SiCl4 pre valve closed
5/19/2012	12:13:46 AM	SiCl4 post valve closed
5/19/2012	12:13:46 AM	Main Vac valve closed
5/19/2012	12:13:46 AM	Bubbler valve closed
5/19/2012	12:13:46 AM	Bypass valve opened
5/19/2012	12:13:46 AM	Helium MFC set to  0.000000
5/19/2012	12:13:46 AM	H2 MFC set to  0.000000
5/19/2012	12:13:46 AM	BCl3 MFC set to  0.000000
5/19/2012	12:13:46 AM	PH3 MFC set to  0.000000
5/19/2012	12:13:46 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:13:46 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:13:46 AM	Tube furnace set to 0
5/19/2012	12:14:53 AM	Helium valve closed
5/19/2012	12:14:53 AM	H2 valve closed
5/19/2012	12:14:53 AM	BCl3 valve closed
5/19/2012	12:14:53 AM	PH3 valve closed
5/19/2012	12:14:53 AM	SiCl4 pre valve closed
5/19/2012	12:14:53 AM	SiCl4 post valve closed
5/19/2012	12:14:53 AM	Main Vac valve closed
5/19/2012	12:14:53 AM	Bubbler valve closed
5/19/2012	12:14:53 AM	Bypass valve opened
5/19/2012	12:14:53 AM	Helium MFC set to  0.000000
5/19/2012	12:14:53 AM	H2 MFC set to  0.000000
5/19/2012	12:14:53 AM	BCl3 MFC set to  0.000000
5/19/2012	12:14:53 AM	PH3 MFC set to  0.000000
5/19/2012	12:14:53 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:14:53 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:14:53 AM	Tube furnace set to 0
5/19/2012	12:15:53 AM	Helium valve closed
5/19/2012	12:15:53 AM	H2 valve closed
5/19/2012	12:15:53 AM	BCl3 valve closed
5/19/2012	12:15:53 AM	PH3 valve closed
5/19/2012	12:15:53 AM	SiCl4 pre valve closed
5/19/2012	12:15:53 AM	SiCl4 post valve closed
5/19/2012	12:15:53 AM	Bypass valve closed
5/19/2012	12:15:53 AM	Bubbler valve closed
5/19/2012	12:15:53 AM	Main Vac valve opened
5/19/2012	12:15:53 AM	Helium MFC set to  0.000000
5/19/2012	12:15:53 AM	H2 MFC set to  0.000000
5/19/2012	12:15:53 AM	BCl3 MFC set to  0.000000
5/19/2012	12:15:53 AM	PH3 MFC set to  0.000000
5/19/2012	12:15:53 AM	SiCl4 MFC set to  0.000000
5/19/2012	12:15:53 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:15:54 AM	Tube furnace set to 0
5/19/2012	12:15:55 AM	Run finished at 12:15 AM
5/19/2012	12:15:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	12:37:37 AM	Helium MFC set to  10.000000
5/19/2012	12:37:38 AM	Helium valve opened
5/19/2012	12:38:06 AM	Helium valve closed
5/19/2012	1:08:45 AM	Main Vac valve closed
5/19/2012	1:09:04 AM	Main Vac valve opened
5/19/2012	1:09:26 AM	Helium valve opened
5/19/2012	1:09:48 AM	Helium valve closed
5/19/2012	1:09:52 AM	Helium MFC set to  15.000000
5/19/2012	1:09:53 AM	Helium valve opened
5/19/2012	1:09:55 AM	Helium valve closed
5/19/2012	1:11:02 AM	Helium valve opened
5/19/2012	1:11:11 AM	Helium valve closed
5/19/2012	1:15:15 AM	Recipe started at 1:15 AM
5/19/2012	1:15:15 AM	Helium valve closed
5/19/2012	1:15:15 AM	H2 valve closed
5/19/2012	1:15:15 AM	BCl3 valve closed
5/19/2012	1:15:15 AM	PH3 valve closed
5/19/2012	1:15:15 AM	SiCl4 pre valve closed
5/19/2012	1:15:15 AM	SiCl4 post valve closed
5/19/2012	1:15:15 AM	Main Vac valve closed
5/19/2012	1:15:15 AM	Bypass valve closed
5/19/2012	1:15:15 AM	Bubbler valve closed
5/19/2012	1:15:15 AM	Helium MFC set to  0.000000
5/19/2012	1:15:15 AM	H2 MFC set to  0.000000
5/19/2012	1:15:15 AM	BCl3 MFC set to  0.000000
5/19/2012	1:15:15 AM	PH3 MFC set to  0.000000
5/19/2012	1:15:15 AM	SiCl4 MFC set to  0.000000
5/19/2012	1:15:15 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	1:15:15 AM	Tube furnace set to 0
5/19/2012	1:15:18 AM	Helium valve closed
5/19/2012	1:15:18 AM	BCl3 valve closed
5/19/2012	1:15:18 AM	PH3 valve closed
5/19/2012	1:15:18 AM	SiCl4 pre valve closed
5/19/2012	1:15:18 AM	SiCl4 post valve closed
5/19/2012	1:15:18 AM	Main Vac valve closed
5/19/2012	1:15:18 AM	Bypass valve closed
5/19/2012	1:15:18 AM	Bubbler valve closed
5/19/2012	1:15:18 AM	H2 valve opened
5/19/2012	1:15:18 AM	Helium MFC set to  0.000000
5/19/2012	1:15:18 AM	H2 MFC set to  500.000000
5/19/2012	1:15:18 AM	BCl3 MFC set to  0.000000
5/19/2012	1:15:18 AM	PH3 MFC set to  0.000000
5/19/2012	1:15:18 AM	SiCl4 MFC set to  0.000000
5/19/2012	1:15:18 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	1:15:18 AM	Tube furnace set to 0
5/19/2012	1:16:34 AM	Helium valve closed
5/19/2012	1:16:34 AM	BCl3 valve closed
5/19/2012	1:16:34 AM	PH3 valve closed
5/19/2012	1:16:34 AM	SiCl4 pre valve closed
5/19/2012	1:16:34 AM	SiCl4 post valve closed
5/19/2012	1:16:34 AM	Main Vac valve closed
5/19/2012	1:16:34 AM	Bypass valve closed
5/19/2012	1:16:34 AM	H2 valve opened
5/19/2012	1:16:34 AM	Bubbler valve opened
5/19/2012	1:16:34 AM	Helium MFC set to  0.000000
5/19/2012	1:16:34 AM	H2 MFC set to  500.000000
5/19/2012	1:16:34 AM	BCl3 MFC set to  0.000000
5/19/2012	1:16:34 AM	PH3 MFC set to  0.000000
5/19/2012	1:16:34 AM	SiCl4 MFC set to  0.000000
5/19/2012	1:16:34 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	1:16:34 AM	Tube furnace set to 0
5/19/2012	1:16:35 AM	Helium valve closed
5/19/2012	1:16:35 AM	BCl3 valve closed
5/19/2012	1:16:35 AM	PH3 valve closed
5/19/2012	1:16:35 AM	SiCl4 pre valve closed
5/19/2012	1:16:35 AM	SiCl4 post valve closed
5/19/2012	1:16:35 AM	Main Vac valve closed
5/19/2012	1:16:35 AM	Bypass valve closed
5/19/2012	1:16:35 AM	H2 valve opened
5/19/2012	1:16:35 AM	Bubbler valve opened
5/19/2012	1:16:35 AM	Helium MFC set to  0.000000
5/19/2012	1:16:35 AM	H2 MFC set to  500.000000
5/19/2012	1:16:35 AM	BCl3 MFC set to  0.000000
5/19/2012	1:16:35 AM	PH3 MFC set to  0.000000
5/19/2012	1:16:35 AM	SiCl4 MFC set to  0.000000
5/19/2012	1:16:35 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	1:16:36 AM	Tube furnace set to 1000
5/19/2012	1:41:36 AM	Helium valve closed
5/19/2012	1:41:36 AM	BCl3 valve closed
5/19/2012	1:41:36 AM	PH3 valve closed
5/19/2012	1:41:36 AM	Main Vac valve closed
5/19/2012	1:41:36 AM	Bypass valve closed
5/19/2012	1:41:36 AM	H2 valve opened
5/19/2012	1:41:36 AM	SiCl4 pre valve opened
5/19/2012	1:41:36 AM	SiCl4 post valve opened
5/19/2012	1:41:36 AM	Bubbler valve opened
5/19/2012	1:41:36 AM	Helium MFC set to  0.000000
5/19/2012	1:41:36 AM	H2 MFC set to  500.000000
5/19/2012	1:41:36 AM	BCl3 MFC set to  0.000000
5/19/2012	1:41:36 AM	PH3 MFC set to  0.000000
5/19/2012	1:41:36 AM	SiCl4 MFC set to  50.000000
5/19/2012	1:41:36 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	1:41:36 AM	Tube furnace set to 1000
5/19/2012	2:01:36 AM	Helium valve closed
5/19/2012	2:01:36 AM	BCl3 valve closed
5/19/2012	2:01:36 AM	PH3 valve closed
5/19/2012	2:01:36 AM	SiCl4 pre valve closed
5/19/2012	2:01:36 AM	SiCl4 post valve closed
5/19/2012	2:01:36 AM	Main Vac valve closed
5/19/2012	2:01:36 AM	Bypass valve closed
5/19/2012	2:01:36 AM	H2 valve opened
5/19/2012	2:01:36 AM	Bubbler valve opened
5/19/2012	2:01:36 AM	Helium MFC set to  0.000000
5/19/2012	2:01:36 AM	H2 MFC set to  500.000000
5/19/2012	2:01:36 AM	BCl3 MFC set to  0.000000
5/19/2012	2:01:36 AM	PH3 MFC set to  0.000000
5/19/2012	2:01:36 AM	SiCl4 MFC set to  0.000000
5/19/2012	2:01:36 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:01:36 AM	Tube furnace set to 750
5/19/2012	2:16:36 AM	Helium valve closed
5/19/2012	2:16:36 AM	BCl3 valve closed
5/19/2012	2:16:36 AM	PH3 valve closed
5/19/2012	2:16:36 AM	SiCl4 pre valve closed
5/19/2012	2:16:36 AM	SiCl4 post valve closed
5/19/2012	2:16:36 AM	Main Vac valve closed
5/19/2012	2:16:36 AM	Bypass valve closed
5/19/2012	2:16:36 AM	H2 valve opened
5/19/2012	2:16:36 AM	Bubbler valve opened
5/19/2012	2:16:36 AM	Helium MFC set to  0.000000
5/19/2012	2:16:36 AM	H2 MFC set to  500.000000
5/19/2012	2:16:36 AM	BCl3 MFC set to  0.000000
5/19/2012	2:16:36 AM	PH3 MFC set to  0.000000
5/19/2012	2:16:36 AM	SiCl4 MFC set to  0.000000
5/19/2012	2:16:36 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:16:36 AM	Tube furnace set to 0
5/19/2012	2:49:56 AM	H2 valve closed
5/19/2012	2:49:56 AM	BCl3 valve closed
5/19/2012	2:49:56 AM	PH3 valve closed
5/19/2012	2:49:56 AM	SiCl4 pre valve closed
5/19/2012	2:49:56 AM	SiCl4 post valve closed
5/19/2012	2:49:56 AM	Main Vac valve closed
5/19/2012	2:49:56 AM	Bypass valve closed
5/19/2012	2:49:56 AM	Helium valve opened
5/19/2012	2:49:56 AM	Bubbler valve opened
5/19/2012	2:49:56 AM	Helium MFC set to  500.000000
5/19/2012	2:49:56 AM	H2 MFC set to  0.000000
5/19/2012	2:49:56 AM	BCl3 MFC set to  0.000000
5/19/2012	2:49:56 AM	PH3 MFC set to  0.000000
5/19/2012	2:49:56 AM	SiCl4 MFC set to  0.000000
5/19/2012	2:49:56 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:49:56 AM	Tube furnace set to 0
5/19/2012	2:56:36 AM	Helium valve closed
5/19/2012	2:56:36 AM	H2 valve closed
5/19/2012	2:56:36 AM	BCl3 valve closed
5/19/2012	2:56:36 AM	PH3 valve closed
5/19/2012	2:56:36 AM	SiCl4 pre valve closed
5/19/2012	2:56:36 AM	SiCl4 post valve closed
5/19/2012	2:56:36 AM	Main Vac valve closed
5/19/2012	2:56:36 AM	Bypass valve closed
5/19/2012	2:56:36 AM	Bubbler valve closed
5/19/2012	2:56:36 AM	Helium MFC set to  0.000000
5/19/2012	2:56:36 AM	H2 MFC set to  0.000000
5/19/2012	2:56:36 AM	BCl3 MFC set to  0.000000
5/19/2012	2:56:36 AM	PH3 MFC set to  0.000000
5/19/2012	2:56:36 AM	SiCl4 MFC set to  0.000000
5/19/2012	2:56:36 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:56:37 AM	Tube furnace set to 0
5/19/2012	3:16:37 AM	Helium valve closed
5/19/2012	3:16:37 AM	H2 valve closed
5/19/2012	3:16:37 AM	BCl3 valve closed
5/19/2012	3:16:37 AM	PH3 valve closed
5/19/2012	3:16:37 AM	SiCl4 pre valve closed
5/19/2012	3:16:37 AM	SiCl4 post valve closed
5/19/2012	3:16:37 AM	Main Vac valve closed
5/19/2012	3:16:37 AM	Bubbler valve closed
5/19/2012	3:16:37 AM	Bypass valve opened
5/19/2012	3:16:37 AM	Helium MFC set to  0.000000
5/19/2012	3:16:37 AM	H2 MFC set to  0.000000
5/19/2012	3:16:37 AM	BCl3 MFC set to  0.000000
5/19/2012	3:16:37 AM	PH3 MFC set to  0.000000
5/19/2012	3:16:37 AM	SiCl4 MFC set to  0.000000
5/19/2012	3:16:37 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	3:16:37 AM	Tube furnace set to 0
5/19/2012	3:17:28 AM	Helium valve closed
5/19/2012	3:17:28 AM	H2 valve closed
5/19/2012	3:17:28 AM	BCl3 valve closed
5/19/2012	3:17:28 AM	PH3 valve closed
5/19/2012	3:17:28 AM	SiCl4 pre valve closed
5/19/2012	3:17:28 AM	SiCl4 post valve closed
5/19/2012	3:17:28 AM	Main Vac valve closed
5/19/2012	3:17:28 AM	Bubbler valve closed
5/19/2012	3:17:28 AM	Bypass valve opened
5/19/2012	3:17:28 AM	Helium MFC set to  0.000000
5/19/2012	3:17:28 AM	H2 MFC set to  0.000000
5/19/2012	3:17:28 AM	BCl3 MFC set to  0.000000
5/19/2012	3:17:28 AM	PH3 MFC set to  0.000000
5/19/2012	3:17:28 AM	SiCl4 MFC set to  0.000000
5/19/2012	3:17:28 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	3:17:29 AM	Tube furnace set to 0
5/19/2012	3:18:29 AM	Helium valve closed
5/19/2012	3:18:29 AM	H2 valve closed
5/19/2012	3:18:29 AM	BCl3 valve closed
5/19/2012	3:18:29 AM	PH3 valve closed
5/19/2012	3:18:29 AM	SiCl4 pre valve closed
5/19/2012	3:18:29 AM	SiCl4 post valve closed
5/19/2012	3:18:29 AM	Bypass valve closed
5/19/2012	3:18:29 AM	Bubbler valve closed
5/19/2012	3:18:29 AM	Main Vac valve opened
5/19/2012	3:18:29 AM	Helium MFC set to  0.000000
5/19/2012	3:18:29 AM	H2 MFC set to  0.000000
5/19/2012	3:18:29 AM	BCl3 MFC set to  0.000000
5/19/2012	3:18:29 AM	PH3 MFC set to  0.000000
5/19/2012	3:18:29 AM	SiCl4 MFC set to  0.000000
5/19/2012	3:18:29 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	3:18:29 AM	Tube furnace set to 0
5/19/2012	4:18:29 AM	Run finished at 4:18 AM
5/19/2012	11:07:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2012	11:07:40 AM	Recipe started at 11:07 AM
5/19/2012	11:07:40 AM	Helium valve closed
5/19/2012	11:07:40 AM	H2 valve closed
5/19/2012	11:07:40 AM	BCl3 valve closed
5/19/2012	11:07:40 AM	PH3 valve closed
5/19/2012	11:07:40 AM	SiCl4 pre valve closed
5/19/2012	11:07:40 AM	SiCl4 post valve closed
5/19/2012	11:07:40 AM	Main Vac valve closed
5/19/2012	11:07:40 AM	Bypass valve closed
5/19/2012	11:07:40 AM	Bubbler valve closed
5/19/2012	11:07:40 AM	Helium MFC set to  0.000000
5/19/2012	11:07:40 AM	H2 MFC set to  0.000000
5/19/2012	11:07:40 AM	BCl3 MFC set to  0.000000
5/19/2012	11:07:40 AM	PH3 MFC set to  0.000000
5/19/2012	11:07:40 AM	SiCl4 MFC set to  0.000000
5/19/2012	11:07:40 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	11:07:41 AM	Tube furnace set to 0
5/19/2012	11:07:44 AM	H2 valve closed
5/19/2012	11:07:44 AM	BCl3 valve closed
5/19/2012	11:07:44 AM	PH3 valve closed
5/19/2012	11:07:44 AM	SiCl4 pre valve closed
5/19/2012	11:07:44 AM	SiCl4 post valve closed
5/19/2012	11:07:44 AM	Main Vac valve closed
5/19/2012	11:07:44 AM	Bypass valve closed
5/19/2012	11:07:44 AM	Bubbler valve closed
5/19/2012	11:07:44 AM	Helium valve opened
5/19/2012	11:07:44 AM	Helium MFC set to  500.000000
5/19/2012	11:07:44 AM	H2 MFC set to  0.000000
5/19/2012	11:07:44 AM	BCl3 MFC set to  0.000000
5/19/2012	11:07:44 AM	PH3 MFC set to  0.000000
5/19/2012	11:07:44 AM	SiCl4 MFC set to  0.000000
5/19/2012	11:07:44 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	11:07:44 AM	Tube furnace set to 0
5/19/2012	11:08:57 AM	Helium valve closed
5/19/2012	11:08:57 AM	H2 valve closed
5/19/2012	11:08:57 AM	BCl3 valve closed
5/19/2012	11:08:57 AM	PH3 valve closed
5/19/2012	11:08:57 AM	SiCl4 pre valve closed
5/19/2012	11:08:57 AM	SiCl4 post valve closed
5/19/2012	11:08:57 AM	Main Vac valve closed
5/19/2012	11:08:57 AM	Bypass valve closed
5/19/2012	11:08:57 AM	Bubbler valve closed
5/19/2012	11:08:57 AM	Helium MFC set to  0.000000
5/19/2012	11:08:57 AM	H2 MFC set to  0.000000
5/19/2012	11:08:57 AM	BCl3 MFC set to  0.000000
5/19/2012	11:08:57 AM	PH3 MFC set to  0.000000
5/19/2012	11:08:57 AM	SiCl4 MFC set to  0.000000
5/19/2012	11:08:57 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	11:08:57 AM	Tube furnace set to 0
5/19/2012	11:08:58 AM	Run finished at 11:08 AM
5/19/2012	11:08:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2012	11:18:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	11:18:22 AM	Recipe started at 11:18 AM
5/19/2012	11:18:22 AM	Helium valve closed
5/19/2012	11:18:22 AM	H2 valve closed
5/19/2012	11:18:22 AM	BCl3 valve closed
5/19/2012	11:18:22 AM	PH3 valve closed
5/19/2012	11:18:22 AM	SiCl4 pre valve closed
5/19/2012	11:18:22 AM	SiCl4 post valve closed
5/19/2012	11:18:22 AM	Main Vac valve closed
5/19/2012	11:18:22 AM	Bubbler valve closed
5/19/2012	11:18:22 AM	Bypass valve opened
5/19/2012	11:18:22 AM	Helium MFC set to  0.000000
5/19/2012	11:18:22 AM	H2 MFC set to  0.000000
5/19/2012	11:18:22 AM	BCl3 MFC set to  0.000000
5/19/2012	11:18:22 AM	PH3 MFC set to  0.000000
5/19/2012	11:18:22 AM	SiCl4 MFC set to  0.000000
5/19/2012	11:18:22 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	11:18:22 AM	Tube furnace set to 0
5/19/2012	11:19:36 AM	Helium valve closed
5/19/2012	11:19:36 AM	H2 valve closed
5/19/2012	11:19:36 AM	BCl3 valve closed
5/19/2012	11:19:36 AM	PH3 valve closed
5/19/2012	11:19:36 AM	SiCl4 pre valve closed
5/19/2012	11:19:36 AM	SiCl4 post valve closed
5/19/2012	11:19:36 AM	Main Vac valve closed
5/19/2012	11:19:36 AM	Bubbler valve closed
5/19/2012	11:19:36 AM	Bypass valve opened
5/19/2012	11:19:36 AM	Helium MFC set to  0.000000
5/19/2012	11:19:36 AM	H2 MFC set to  0.000000
5/19/2012	11:19:36 AM	BCl3 MFC set to  0.000000
5/19/2012	11:19:36 AM	PH3 MFC set to  0.000000
5/19/2012	11:19:36 AM	SiCl4 MFC set to  0.000000
5/19/2012	11:19:36 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	11:19:36 AM	Tube furnace set to 0
5/19/2012	11:19:56 AM	Helium valve closed
5/19/2012	11:19:56 AM	H2 valve closed
5/19/2012	11:19:56 AM	BCl3 valve closed
5/19/2012	11:19:56 AM	PH3 valve closed
5/19/2012	11:19:56 AM	SiCl4 pre valve closed
5/19/2012	11:19:56 AM	SiCl4 post valve closed
5/19/2012	11:19:57 AM	Bypass valve closed
5/19/2012	11:19:57 AM	Bubbler valve closed
5/19/2012	11:19:57 AM	Main Vac valve opened
5/19/2012	11:19:57 AM	Helium MFC set to  0.000000
5/19/2012	11:19:57 AM	H2 MFC set to  0.000000
5/19/2012	11:19:57 AM	BCl3 MFC set to  0.000000
5/19/2012	11:19:57 AM	PH3 MFC set to  0.000000
5/19/2012	11:19:57 AM	SiCl4 MFC set to  0.000000
5/19/2012	11:19:57 AM	Bypass solenoid MFC set to  0.000000
5/19/2012	11:19:57 AM	Tube furnace set to 0
5/19/2012	11:19:58 AM	Run finished at 11:19 AM
5/19/2012	11:19:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	11:56:10 AM	Helium MFC set to  20.000000
5/19/2012	11:56:11 AM	Helium valve opened
5/19/2012	11:57:37 AM	Helium valve closed
5/19/2012	12:17:47 PM	Helium valve opened
5/19/2012	12:18:54 PM	Helium valve closed
5/19/2012	12:54:42 PM	Main Vac valve closed
5/19/2012	12:55:07 PM	Main Vac valve opened
5/19/2012	12:55:08 PM	Helium valve opened
5/19/2012	12:55:09 PM	Helium valve closed
5/19/2012	12:56:39 PM	Recipe started at 12:56 PM
5/19/2012	12:56:39 PM	Helium valve closed
5/19/2012	12:56:39 PM	H2 valve closed
5/19/2012	12:56:39 PM	BCl3 valve closed
5/19/2012	12:56:39 PM	PH3 valve closed
5/19/2012	12:56:39 PM	SiCl4 pre valve closed
5/19/2012	12:56:39 PM	SiCl4 post valve closed
5/19/2012	12:56:39 PM	Main Vac valve closed
5/19/2012	12:56:39 PM	Bypass valve closed
5/19/2012	12:56:39 PM	Bubbler valve closed
5/19/2012	12:56:39 PM	Helium MFC set to  0.000000
5/19/2012	12:56:39 PM	H2 MFC set to  0.000000
5/19/2012	12:56:39 PM	BCl3 MFC set to  0.000000
5/19/2012	12:56:39 PM	PH3 MFC set to  0.000000
5/19/2012	12:56:39 PM	SiCl4 MFC set to  0.000000
5/19/2012	12:56:39 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:56:39 PM	Tube furnace set to 0
5/19/2012	12:56:42 PM	Helium valve closed
5/19/2012	12:56:42 PM	BCl3 valve closed
5/19/2012	12:56:42 PM	PH3 valve closed
5/19/2012	12:56:42 PM	SiCl4 pre valve closed
5/19/2012	12:56:42 PM	SiCl4 post valve closed
5/19/2012	12:56:42 PM	Main Vac valve closed
5/19/2012	12:56:42 PM	Bypass valve closed
5/19/2012	12:56:42 PM	Bubbler valve closed
5/19/2012	12:56:42 PM	H2 valve opened
5/19/2012	12:56:42 PM	Helium MFC set to  0.000000
5/19/2012	12:56:42 PM	H2 MFC set to  500.000000
5/19/2012	12:56:42 PM	BCl3 MFC set to  0.000000
5/19/2012	12:56:42 PM	PH3 MFC set to  0.000000
5/19/2012	12:56:42 PM	SiCl4 MFC set to  0.000000
5/19/2012	12:56:42 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:56:42 PM	Tube furnace set to 0
5/19/2012	12:57:59 PM	Helium valve closed
5/19/2012	12:57:59 PM	BCl3 valve closed
5/19/2012	12:57:59 PM	PH3 valve closed
5/19/2012	12:57:59 PM	SiCl4 pre valve closed
5/19/2012	12:57:59 PM	SiCl4 post valve closed
5/19/2012	12:57:59 PM	Main Vac valve closed
5/19/2012	12:57:59 PM	Bypass valve closed
5/19/2012	12:57:59 PM	H2 valve opened
5/19/2012	12:57:59 PM	Bubbler valve opened
5/19/2012	12:57:59 PM	Helium MFC set to  0.000000
5/19/2012	12:57:59 PM	H2 MFC set to  500.000000
5/19/2012	12:57:59 PM	BCl3 MFC set to  0.000000
5/19/2012	12:57:59 PM	PH3 MFC set to  0.000000
5/19/2012	12:57:59 PM	SiCl4 MFC set to  0.000000
5/19/2012	12:57:59 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:57:59 PM	Tube furnace set to 0
5/19/2012	12:58:00 PM	Helium valve closed
5/19/2012	12:58:00 PM	BCl3 valve closed
5/19/2012	12:58:00 PM	PH3 valve closed
5/19/2012	12:58:00 PM	SiCl4 pre valve closed
5/19/2012	12:58:00 PM	SiCl4 post valve closed
5/19/2012	12:58:00 PM	Main Vac valve closed
5/19/2012	12:58:00 PM	Bypass valve closed
5/19/2012	12:58:00 PM	H2 valve opened
5/19/2012	12:58:00 PM	Bubbler valve opened
5/19/2012	12:58:00 PM	Helium MFC set to  0.000000
5/19/2012	12:58:00 PM	H2 MFC set to  500.000000
5/19/2012	12:58:00 PM	BCl3 MFC set to  0.000000
5/19/2012	12:58:00 PM	PH3 MFC set to  0.000000
5/19/2012	12:58:00 PM	SiCl4 MFC set to  0.000000
5/19/2012	12:58:00 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	12:58:00 PM	Tube furnace set to 1000
5/19/2012	1:23:00 PM	Helium valve closed
5/19/2012	1:23:00 PM	BCl3 valve closed
5/19/2012	1:23:00 PM	PH3 valve closed
5/19/2012	1:23:00 PM	Main Vac valve closed
5/19/2012	1:23:00 PM	Bypass valve closed
5/19/2012	1:23:00 PM	H2 valve opened
5/19/2012	1:23:00 PM	SiCl4 pre valve opened
5/19/2012	1:23:00 PM	SiCl4 post valve opened
5/19/2012	1:23:00 PM	Bubbler valve opened
5/19/2012	1:23:00 PM	Helium MFC set to  0.000000
5/19/2012	1:23:00 PM	H2 MFC set to  500.000000
5/19/2012	1:23:00 PM	BCl3 MFC set to  0.000000
5/19/2012	1:23:00 PM	PH3 MFC set to  0.000000
5/19/2012	1:23:00 PM	SiCl4 MFC set to  50.000000
5/19/2012	1:23:00 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	1:23:00 PM	Tube furnace set to 1000
5/19/2012	2:08:00 PM	Helium valve closed
5/19/2012	2:08:00 PM	BCl3 valve closed
5/19/2012	2:08:00 PM	PH3 valve closed
5/19/2012	2:08:00 PM	SiCl4 pre valve closed
5/19/2012	2:08:00 PM	SiCl4 post valve closed
5/19/2012	2:08:00 PM	Main Vac valve closed
5/19/2012	2:08:00 PM	Bypass valve closed
5/19/2012	2:08:00 PM	H2 valve opened
5/19/2012	2:08:00 PM	Bubbler valve opened
5/19/2012	2:08:00 PM	Helium MFC set to  0.000000
5/19/2012	2:08:00 PM	H2 MFC set to  500.000000
5/19/2012	2:08:00 PM	BCl3 MFC set to  0.000000
5/19/2012	2:08:00 PM	PH3 MFC set to  0.000000
5/19/2012	2:08:00 PM	SiCl4 MFC set to  0.000000
5/19/2012	2:08:00 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:08:01 PM	Tube furnace set to 750
5/19/2012	2:23:01 PM	Helium valve closed
5/19/2012	2:23:01 PM	BCl3 valve closed
5/19/2012	2:23:01 PM	PH3 valve closed
5/19/2012	2:23:01 PM	SiCl4 pre valve closed
5/19/2012	2:23:01 PM	SiCl4 post valve closed
5/19/2012	2:23:01 PM	Main Vac valve closed
5/19/2012	2:23:01 PM	Bypass valve closed
5/19/2012	2:23:01 PM	H2 valve opened
5/19/2012	2:23:01 PM	Bubbler valve opened
5/19/2012	2:23:01 PM	Helium MFC set to  0.000000
5/19/2012	2:23:01 PM	H2 MFC set to  500.000000
5/19/2012	2:23:01 PM	BCl3 MFC set to  0.000000
5/19/2012	2:23:01 PM	PH3 MFC set to  0.000000
5/19/2012	2:23:01 PM	SiCl4 MFC set to  0.000000
5/19/2012	2:23:01 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:23:01 PM	Tube furnace set to 0
5/19/2012	2:55:30 PM	H2 valve closed
5/19/2012	2:55:30 PM	BCl3 valve closed
5/19/2012	2:55:30 PM	PH3 valve closed
5/19/2012	2:55:30 PM	SiCl4 pre valve closed
5/19/2012	2:55:30 PM	SiCl4 post valve closed
5/19/2012	2:55:30 PM	Main Vac valve closed
5/19/2012	2:55:30 PM	Bypass valve closed
5/19/2012	2:55:30 PM	Helium valve opened
5/19/2012	2:55:30 PM	Bubbler valve opened
5/19/2012	2:55:30 PM	Helium MFC set to  500.000000
5/19/2012	2:55:30 PM	H2 MFC set to  0.000000
5/19/2012	2:55:30 PM	BCl3 MFC set to  0.000000
5/19/2012	2:55:30 PM	PH3 MFC set to  0.000000
5/19/2012	2:55:30 PM	SiCl4 MFC set to  0.000000
5/19/2012	2:55:30 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	2:55:30 PM	Tube furnace set to 0
5/19/2012	2:55:47 PM	Run aborted at 2:55 PM
5/19/2012	2:55:47 PM	Helium valve closed
5/19/2012	2:55:47 PM	H2 valve closed
5/19/2012	2:55:47 PM	BCl3 valve closed
5/19/2012	2:55:47 PM	PH3 valve closed
5/19/2012	2:55:47 PM	SiCl4 pre valve closed
5/19/2012	2:55:47 PM	SiCl4 post valve closed
5/19/2012	2:55:47 PM	Bypass valve closed
5/19/2012	2:55:47 PM	Main Vac valve closed
5/19/2012	2:55:47 PM	Bubbler valve closed
5/19/2012	2:55:47 PM	Helium MFC set to  0.000000
5/19/2012	2:55:47 PM	H2 MFC set to  0.000000
5/19/2012	2:55:47 PM	BCl3 MFC set to  0.000000
5/19/2012	2:55:47 PM	PH3 MFC set to  0.000000
5/19/2012	2:55:47 PM	SiCl4 MFC set to  0.000000
5/19/2012	2:55:47 PM	Tube furnace set to 0
5/19/2012	3:03:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	3:03:19 PM	Recipe started at 3:03 PM
5/19/2012	3:03:19 PM	Helium valve closed
5/19/2012	3:03:19 PM	H2 valve closed
5/19/2012	3:03:19 PM	BCl3 valve closed
5/19/2012	3:03:19 PM	PH3 valve closed
5/19/2012	3:03:19 PM	SiCl4 pre valve closed
5/19/2012	3:03:19 PM	SiCl4 post valve closed
5/19/2012	3:03:19 PM	Main Vac valve closed
5/19/2012	3:03:19 PM	Bubbler valve closed
5/19/2012	3:03:19 PM	Bypass valve opened
5/19/2012	3:03:19 PM	Helium MFC set to  0.000000
5/19/2012	3:03:19 PM	H2 MFC set to  0.000000
5/19/2012	3:03:19 PM	BCl3 MFC set to  0.000000
5/19/2012	3:03:19 PM	PH3 MFC set to  0.000000
5/19/2012	3:03:19 PM	SiCl4 MFC set to  0.000000
5/19/2012	3:03:19 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	3:03:19 PM	Tube furnace set to 0
5/19/2012	3:04:29 PM	Helium valve closed
5/19/2012	3:04:29 PM	H2 valve closed
5/19/2012	3:04:29 PM	BCl3 valve closed
5/19/2012	3:04:29 PM	PH3 valve closed
5/19/2012	3:04:29 PM	SiCl4 pre valve closed
5/19/2012	3:04:29 PM	SiCl4 post valve closed
5/19/2012	3:04:29 PM	Main Vac valve closed
5/19/2012	3:04:29 PM	Bubbler valve closed
5/19/2012	3:04:29 PM	Bypass valve opened
5/19/2012	3:04:29 PM	Helium MFC set to  0.000000
5/19/2012	3:04:29 PM	H2 MFC set to  0.000000
5/19/2012	3:04:29 PM	BCl3 MFC set to  0.000000
5/19/2012	3:04:29 PM	PH3 MFC set to  0.000000
5/19/2012	3:04:29 PM	SiCl4 MFC set to  0.000000
5/19/2012	3:04:29 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	3:04:29 PM	Tube furnace set to 0
5/19/2012	3:04:51 PM	Helium valve closed
5/19/2012	3:04:51 PM	H2 valve closed
5/19/2012	3:04:51 PM	BCl3 valve closed
5/19/2012	3:04:51 PM	PH3 valve closed
5/19/2012	3:04:51 PM	SiCl4 pre valve closed
5/19/2012	3:04:51 PM	SiCl4 post valve closed
5/19/2012	3:04:51 PM	Bypass valve closed
5/19/2012	3:04:51 PM	Bubbler valve closed
5/19/2012	3:04:51 PM	Main Vac valve opened
5/19/2012	3:04:51 PM	Helium MFC set to  0.000000
5/19/2012	3:04:51 PM	H2 MFC set to  0.000000
5/19/2012	3:04:51 PM	BCl3 MFC set to  0.000000
5/19/2012	3:04:51 PM	PH3 MFC set to  0.000000
5/19/2012	3:04:51 PM	SiCl4 MFC set to  0.000000
5/19/2012	3:04:51 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	3:04:51 PM	Tube furnace set to 0
5/19/2012	3:04:52 PM	Run finished at 3:04 PM
5/19/2012	3:04:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	4:13:50 PM	Helium MFC set to  15.000000
5/19/2012	4:13:51 PM	Helium valve opened
5/19/2012	4:21:33 PM	Helium valve closed
5/19/2012	4:48:24 PM	Main Vac valve closed
5/19/2012	4:48:39 PM	Main Vac valve opened
5/19/2012	4:49:34 PM	Recipe started at 4:49 PM
5/19/2012	4:49:34 PM	Helium valve closed
5/19/2012	4:49:34 PM	H2 valve closed
5/19/2012	4:49:34 PM	BCl3 valve closed
5/19/2012	4:49:34 PM	PH3 valve closed
5/19/2012	4:49:34 PM	SiCl4 pre valve closed
5/19/2012	4:49:34 PM	SiCl4 post valve closed
5/19/2012	4:49:34 PM	Main Vac valve closed
5/19/2012	4:49:34 PM	Bypass valve closed
5/19/2012	4:49:34 PM	Bubbler valve closed
5/19/2012	4:49:34 PM	Helium MFC set to  0.000000
5/19/2012	4:49:34 PM	H2 MFC set to  0.000000
5/19/2012	4:49:34 PM	BCl3 MFC set to  0.000000
5/19/2012	4:49:34 PM	PH3 MFC set to  0.000000
5/19/2012	4:49:34 PM	SiCl4 MFC set to  0.000000
5/19/2012	4:49:34 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	4:49:34 PM	Tube furnace set to 0
5/19/2012	4:49:37 PM	Helium valve closed
5/19/2012	4:49:37 PM	BCl3 valve closed
5/19/2012	4:49:37 PM	PH3 valve closed
5/19/2012	4:49:37 PM	SiCl4 pre valve closed
5/19/2012	4:49:37 PM	SiCl4 post valve closed
5/19/2012	4:49:37 PM	Main Vac valve closed
5/19/2012	4:49:37 PM	Bypass valve closed
5/19/2012	4:49:37 PM	Bubbler valve closed
5/19/2012	4:49:37 PM	H2 valve opened
5/19/2012	4:49:37 PM	Helium MFC set to  0.000000
5/19/2012	4:49:37 PM	H2 MFC set to  500.000000
5/19/2012	4:49:37 PM	BCl3 MFC set to  0.000000
5/19/2012	4:49:37 PM	PH3 MFC set to  0.000000
5/19/2012	4:49:37 PM	SiCl4 MFC set to  0.000000
5/19/2012	4:49:37 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	4:49:37 PM	Tube furnace set to 0
5/19/2012	4:50:54 PM	Helium valve closed
5/19/2012	4:50:54 PM	BCl3 valve closed
5/19/2012	4:50:54 PM	PH3 valve closed
5/19/2012	4:50:54 PM	SiCl4 pre valve closed
5/19/2012	4:50:54 PM	SiCl4 post valve closed
5/19/2012	4:50:54 PM	Main Vac valve closed
5/19/2012	4:50:54 PM	Bypass valve closed
5/19/2012	4:50:54 PM	H2 valve opened
5/19/2012	4:50:54 PM	Bubbler valve opened
5/19/2012	4:50:54 PM	Helium MFC set to  0.000000
5/19/2012	4:50:54 PM	H2 MFC set to  500.000000
5/19/2012	4:50:54 PM	BCl3 MFC set to  0.000000
5/19/2012	4:50:54 PM	PH3 MFC set to  0.000000
5/19/2012	4:50:54 PM	SiCl4 MFC set to  0.000000
5/19/2012	4:50:54 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	4:50:54 PM	Tube furnace set to 0
5/19/2012	4:50:55 PM	Helium valve closed
5/19/2012	4:50:55 PM	BCl3 valve closed
5/19/2012	4:50:55 PM	PH3 valve closed
5/19/2012	4:50:55 PM	SiCl4 pre valve closed
5/19/2012	4:50:55 PM	SiCl4 post valve closed
5/19/2012	4:50:55 PM	Main Vac valve closed
5/19/2012	4:50:55 PM	Bypass valve closed
5/19/2012	4:50:55 PM	H2 valve opened
5/19/2012	4:50:55 PM	Bubbler valve opened
5/19/2012	4:50:55 PM	Helium MFC set to  0.000000
5/19/2012	4:50:55 PM	H2 MFC set to  500.000000
5/19/2012	4:50:55 PM	BCl3 MFC set to  0.000000
5/19/2012	4:50:55 PM	PH3 MFC set to  0.000000
5/19/2012	4:50:55 PM	SiCl4 MFC set to  0.000000
5/19/2012	4:50:55 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	4:50:55 PM	Tube furnace set to 1000
5/19/2012	5:15:55 PM	Helium valve closed
5/19/2012	5:15:55 PM	BCl3 valve closed
5/19/2012	5:15:55 PM	PH3 valve closed
5/19/2012	5:15:55 PM	Main Vac valve closed
5/19/2012	5:15:55 PM	Bypass valve closed
5/19/2012	5:15:55 PM	H2 valve opened
5/19/2012	5:15:55 PM	SiCl4 pre valve opened
5/19/2012	5:15:55 PM	SiCl4 post valve opened
5/19/2012	5:15:55 PM	Bubbler valve opened
5/19/2012	5:15:55 PM	Helium MFC set to  0.000000
5/19/2012	5:15:55 PM	H2 MFC set to  500.000000
5/19/2012	5:15:55 PM	BCl3 MFC set to  0.000000
5/19/2012	5:15:55 PM	PH3 MFC set to  0.000000
5/19/2012	5:15:55 PM	SiCl4 MFC set to  50.000000
5/19/2012	5:15:55 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	5:15:55 PM	Tube furnace set to 1000
5/19/2012	5:45:55 PM	Helium valve closed
5/19/2012	5:45:55 PM	BCl3 valve closed
5/19/2012	5:45:55 PM	PH3 valve closed
5/19/2012	5:45:55 PM	SiCl4 pre valve closed
5/19/2012	5:45:55 PM	SiCl4 post valve closed
5/19/2012	5:45:55 PM	Main Vac valve closed
5/19/2012	5:45:55 PM	Bypass valve closed
5/19/2012	5:45:55 PM	H2 valve opened
5/19/2012	5:45:55 PM	Bubbler valve opened
5/19/2012	5:45:55 PM	Helium MFC set to  0.000000
5/19/2012	5:45:55 PM	H2 MFC set to  500.000000
5/19/2012	5:45:55 PM	BCl3 MFC set to  0.000000
5/19/2012	5:45:55 PM	PH3 MFC set to  0.000000
5/19/2012	5:45:55 PM	SiCl4 MFC set to  0.000000
5/19/2012	5:45:55 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	5:45:55 PM	Tube furnace set to 750
5/19/2012	6:00:55 PM	Helium valve closed
5/19/2012	6:00:55 PM	BCl3 valve closed
5/19/2012	6:00:55 PM	PH3 valve closed
5/19/2012	6:00:55 PM	SiCl4 pre valve closed
5/19/2012	6:00:55 PM	SiCl4 post valve closed
5/19/2012	6:00:55 PM	Main Vac valve closed
5/19/2012	6:00:55 PM	Bypass valve closed
5/19/2012	6:00:55 PM	H2 valve opened
5/19/2012	6:00:55 PM	Bubbler valve opened
5/19/2012	6:00:55 PM	Helium MFC set to  0.000000
5/19/2012	6:00:55 PM	H2 MFC set to  500.000000
5/19/2012	6:00:55 PM	BCl3 MFC set to  0.000000
5/19/2012	6:00:55 PM	PH3 MFC set to  0.000000
5/19/2012	6:00:55 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:00:55 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	6:00:56 PM	Tube furnace set to 0
5/19/2012	6:34:16 PM	H2 valve closed
5/19/2012	6:34:16 PM	BCl3 valve closed
5/19/2012	6:34:16 PM	PH3 valve closed
5/19/2012	6:34:16 PM	SiCl4 pre valve closed
5/19/2012	6:34:16 PM	SiCl4 post valve closed
5/19/2012	6:34:16 PM	Main Vac valve closed
5/19/2012	6:34:16 PM	Bypass valve closed
5/19/2012	6:34:16 PM	Helium valve opened
5/19/2012	6:34:16 PM	Bubbler valve opened
5/19/2012	6:34:16 PM	Helium MFC set to  500.000000
5/19/2012	6:34:16 PM	H2 MFC set to  0.000000
5/19/2012	6:34:16 PM	BCl3 MFC set to  0.000000
5/19/2012	6:34:16 PM	PH3 MFC set to  0.000000
5/19/2012	6:34:16 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:34:16 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	6:34:16 PM	Tube furnace set to 0
5/19/2012	6:40:56 PM	Helium valve closed
5/19/2012	6:40:56 PM	H2 valve closed
5/19/2012	6:40:56 PM	BCl3 valve closed
5/19/2012	6:40:56 PM	PH3 valve closed
5/19/2012	6:40:56 PM	SiCl4 pre valve closed
5/19/2012	6:40:56 PM	SiCl4 post valve closed
5/19/2012	6:40:56 PM	Main Vac valve closed
5/19/2012	6:40:56 PM	Bypass valve closed
5/19/2012	6:40:56 PM	Bubbler valve closed
5/19/2012	6:40:56 PM	Helium MFC set to  0.000000
5/19/2012	6:40:56 PM	H2 MFC set to  0.000000
5/19/2012	6:40:56 PM	BCl3 MFC set to  0.000000
5/19/2012	6:40:56 PM	PH3 MFC set to  0.000000
5/19/2012	6:40:56 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:40:56 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	6:40:56 PM	Tube furnace set to 0
5/19/2012	6:45:42 PM	Run aborted at 6:45 PM
5/19/2012	6:45:42 PM	Helium valve closed
5/19/2012	6:45:42 PM	H2 valve closed
5/19/2012	6:45:42 PM	BCl3 valve closed
5/19/2012	6:45:42 PM	PH3 valve closed
5/19/2012	6:45:42 PM	SiCl4 pre valve closed
5/19/2012	6:45:42 PM	SiCl4 post valve closed
5/19/2012	6:45:42 PM	Bypass valve closed
5/19/2012	6:45:42 PM	Main Vac valve closed
5/19/2012	6:45:42 PM	Bubbler valve closed
5/19/2012	6:45:42 PM	Helium MFC set to  0.000000
5/19/2012	6:45:42 PM	H2 MFC set to  0.000000
5/19/2012	6:45:42 PM	BCl3 MFC set to  0.000000
5/19/2012	6:45:42 PM	PH3 MFC set to  0.000000
5/19/2012	6:45:42 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:45:42 PM	Tube furnace set to 0
5/19/2012	6:50:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	6:50:29 PM	Recipe started at 6:50 PM
5/19/2012	6:50:29 PM	Helium valve closed
5/19/2012	6:50:29 PM	H2 valve closed
5/19/2012	6:50:29 PM	BCl3 valve closed
5/19/2012	6:50:29 PM	PH3 valve closed
5/19/2012	6:50:29 PM	SiCl4 pre valve closed
5/19/2012	6:50:29 PM	SiCl4 post valve closed
5/19/2012	6:50:29 PM	Main Vac valve closed
5/19/2012	6:50:29 PM	Bubbler valve closed
5/19/2012	6:50:29 PM	Bypass valve opened
5/19/2012	6:50:29 PM	Helium MFC set to  0.000000
5/19/2012	6:50:29 PM	H2 MFC set to  0.000000
5/19/2012	6:50:29 PM	BCl3 MFC set to  0.000000
5/19/2012	6:50:29 PM	PH3 MFC set to  0.000000
5/19/2012	6:50:29 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:50:29 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	6:50:29 PM	Tube furnace set to 0
5/19/2012	6:51:39 PM	Helium valve closed
5/19/2012	6:51:39 PM	H2 valve closed
5/19/2012	6:51:39 PM	BCl3 valve closed
5/19/2012	6:51:39 PM	PH3 valve closed
5/19/2012	6:51:39 PM	SiCl4 pre valve closed
5/19/2012	6:51:39 PM	SiCl4 post valve closed
5/19/2012	6:51:39 PM	Main Vac valve closed
5/19/2012	6:51:39 PM	Bubbler valve closed
5/19/2012	6:51:39 PM	Bypass valve opened
5/19/2012	6:51:39 PM	Helium MFC set to  0.000000
5/19/2012	6:51:39 PM	H2 MFC set to  0.000000
5/19/2012	6:51:39 PM	BCl3 MFC set to  0.000000
5/19/2012	6:51:39 PM	PH3 MFC set to  0.000000
5/19/2012	6:51:39 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:51:39 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	6:51:39 PM	Tube furnace set to 0
5/19/2012	6:52:39 PM	Helium valve closed
5/19/2012	6:52:39 PM	H2 valve closed
5/19/2012	6:52:39 PM	BCl3 valve closed
5/19/2012	6:52:39 PM	PH3 valve closed
5/19/2012	6:52:39 PM	SiCl4 pre valve closed
5/19/2012	6:52:39 PM	SiCl4 post valve closed
5/19/2012	6:52:39 PM	Bypass valve closed
5/19/2012	6:52:39 PM	Bubbler valve closed
5/19/2012	6:52:39 PM	Main Vac valve opened
5/19/2012	6:52:39 PM	Helium MFC set to  0.000000
5/19/2012	6:52:39 PM	H2 MFC set to  0.000000
5/19/2012	6:52:39 PM	BCl3 MFC set to  0.000000
5/19/2012	6:52:39 PM	PH3 MFC set to  0.000000
5/19/2012	6:52:39 PM	SiCl4 MFC set to  0.000000
5/19/2012	6:52:39 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	6:52:39 PM	Tube furnace set to 0
5/19/2012	6:52:40 PM	Run finished at 6:52 PM
5/19/2012	6:52:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	8:44:36 PM	Recipe started at 8:44 PM
5/19/2012	8:44:36 PM	Helium valve closed
5/19/2012	8:44:36 PM	H2 valve closed
5/19/2012	8:44:36 PM	BCl3 valve closed
5/19/2012	8:44:36 PM	PH3 valve closed
5/19/2012	8:44:36 PM	SiCl4 pre valve closed
5/19/2012	8:44:36 PM	SiCl4 post valve closed
5/19/2012	8:44:36 PM	Main Vac valve closed
5/19/2012	8:44:36 PM	Bypass valve closed
5/19/2012	8:44:36 PM	Bubbler valve closed
5/19/2012	8:44:36 PM	Helium MFC set to  0.000000
5/19/2012	8:44:36 PM	H2 MFC set to  0.000000
5/19/2012	8:44:36 PM	BCl3 MFC set to  0.000000
5/19/2012	8:44:36 PM	PH3 MFC set to  0.000000
5/19/2012	8:44:36 PM	SiCl4 MFC set to  0.000000
5/19/2012	8:44:36 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	8:44:36 PM	Tube furnace set to 0
5/19/2012	8:44:39 PM	Helium valve closed
5/19/2012	8:44:39 PM	BCl3 valve closed
5/19/2012	8:44:39 PM	PH3 valve closed
5/19/2012	8:44:39 PM	SiCl4 pre valve closed
5/19/2012	8:44:39 PM	SiCl4 post valve closed
5/19/2012	8:44:39 PM	Main Vac valve closed
5/19/2012	8:44:39 PM	Bypass valve closed
5/19/2012	8:44:39 PM	Bubbler valve closed
5/19/2012	8:44:39 PM	H2 valve opened
5/19/2012	8:44:39 PM	Helium MFC set to  0.000000
5/19/2012	8:44:39 PM	H2 MFC set to  500.000000
5/19/2012	8:44:39 PM	BCl3 MFC set to  0.000000
5/19/2012	8:44:39 PM	PH3 MFC set to  0.000000
5/19/2012	8:44:39 PM	SiCl4 MFC set to  0.000000
5/19/2012	8:44:39 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	8:44:39 PM	Tube furnace set to 0
5/19/2012	8:45:54 PM	Helium valve closed
5/19/2012	8:45:54 PM	BCl3 valve closed
5/19/2012	8:45:54 PM	PH3 valve closed
5/19/2012	8:45:54 PM	SiCl4 pre valve closed
5/19/2012	8:45:54 PM	SiCl4 post valve closed
5/19/2012	8:45:54 PM	Main Vac valve closed
5/19/2012	8:45:54 PM	Bypass valve closed
5/19/2012	8:45:54 PM	H2 valve opened
5/19/2012	8:45:54 PM	Bubbler valve opened
5/19/2012	8:45:54 PM	Helium MFC set to  0.000000
5/19/2012	8:45:54 PM	H2 MFC set to  500.000000
5/19/2012	8:45:54 PM	BCl3 MFC set to  0.000000
5/19/2012	8:45:54 PM	PH3 MFC set to  0.000000
5/19/2012	8:45:54 PM	SiCl4 MFC set to  0.000000
5/19/2012	8:45:54 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	8:45:54 PM	Tube furnace set to 0
5/19/2012	8:45:55 PM	Helium valve closed
5/19/2012	8:45:55 PM	BCl3 valve closed
5/19/2012	8:45:55 PM	PH3 valve closed
5/19/2012	8:45:55 PM	SiCl4 pre valve closed
5/19/2012	8:45:56 PM	SiCl4 post valve closed
5/19/2012	8:45:56 PM	Main Vac valve closed
5/19/2012	8:45:56 PM	Bypass valve closed
5/19/2012	8:45:56 PM	H2 valve opened
5/19/2012	8:45:56 PM	Bubbler valve opened
5/19/2012	8:45:56 PM	Helium MFC set to  0.000000
5/19/2012	8:45:56 PM	H2 MFC set to  500.000000
5/19/2012	8:45:56 PM	BCl3 MFC set to  0.000000
5/19/2012	8:45:56 PM	PH3 MFC set to  0.000000
5/19/2012	8:45:56 PM	SiCl4 MFC set to  0.000000
5/19/2012	8:45:56 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	8:45:56 PM	Tube furnace set to 1000
5/19/2012	9:10:56 PM	Helium valve closed
5/19/2012	9:10:56 PM	BCl3 valve closed
5/19/2012	9:10:56 PM	PH3 valve closed
5/19/2012	9:10:56 PM	Main Vac valve closed
5/19/2012	9:10:56 PM	Bypass valve closed
5/19/2012	9:10:56 PM	H2 valve opened
5/19/2012	9:10:56 PM	SiCl4 pre valve opened
5/19/2012	9:10:56 PM	SiCl4 post valve opened
5/19/2012	9:10:56 PM	Bubbler valve opened
5/19/2012	9:10:56 PM	Helium MFC set to  0.000000
5/19/2012	9:10:56 PM	H2 MFC set to  500.000000
5/19/2012	9:10:56 PM	BCl3 MFC set to  0.000000
5/19/2012	9:10:56 PM	PH3 MFC set to  0.000000
5/19/2012	9:10:56 PM	SiCl4 MFC set to  50.000000
5/19/2012	9:10:56 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	9:10:56 PM	Tube furnace set to 1000
5/19/2012	9:22:56 PM	Helium valve closed
5/19/2012	9:22:56 PM	BCl3 valve closed
5/19/2012	9:22:56 PM	PH3 valve closed
5/19/2012	9:22:56 PM	SiCl4 pre valve closed
5/19/2012	9:22:56 PM	SiCl4 post valve closed
5/19/2012	9:22:56 PM	Main Vac valve closed
5/19/2012	9:22:56 PM	Bypass valve closed
5/19/2012	9:22:56 PM	H2 valve opened
5/19/2012	9:22:56 PM	Bubbler valve opened
5/19/2012	9:22:56 PM	Helium MFC set to  0.000000
5/19/2012	9:22:56 PM	H2 MFC set to  500.000000
5/19/2012	9:22:56 PM	BCl3 MFC set to  0.000000
5/19/2012	9:22:56 PM	PH3 MFC set to  0.000000
5/19/2012	9:22:56 PM	SiCl4 MFC set to  0.000000
5/19/2012	9:22:56 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	9:22:56 PM	Tube furnace set to 750
5/19/2012	9:37:56 PM	Helium valve closed
5/19/2012	9:37:56 PM	BCl3 valve closed
5/19/2012	9:37:56 PM	PH3 valve closed
5/19/2012	9:37:56 PM	SiCl4 pre valve closed
5/19/2012	9:37:56 PM	SiCl4 post valve closed
5/19/2012	9:37:56 PM	Main Vac valve closed
5/19/2012	9:37:56 PM	Bypass valve closed
5/19/2012	9:37:56 PM	H2 valve opened
5/19/2012	9:37:56 PM	Bubbler valve opened
5/19/2012	9:37:56 PM	Helium MFC set to  0.000000
5/19/2012	9:37:56 PM	H2 MFC set to  500.000000
5/19/2012	9:37:56 PM	BCl3 MFC set to  0.000000
5/19/2012	9:37:56 PM	PH3 MFC set to  0.000000
5/19/2012	9:37:56 PM	SiCl4 MFC set to  0.000000
5/19/2012	9:37:56 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	9:37:56 PM	Tube furnace set to 0
5/19/2012	10:07:49 PM	Run aborted at 10:07 PM
5/19/2012	10:07:49 PM	Helium valve closed
5/19/2012	10:07:49 PM	H2 valve closed
5/19/2012	10:07:49 PM	BCl3 valve closed
5/19/2012	10:07:49 PM	PH3 valve closed
5/19/2012	10:07:49 PM	SiCl4 pre valve closed
5/19/2012	10:07:49 PM	SiCl4 post valve closed
5/19/2012	10:07:49 PM	Bypass valve closed
5/19/2012	10:07:49 PM	Main Vac valve closed
5/19/2012	10:07:49 PM	Bubbler valve closed
5/19/2012	10:07:49 PM	Helium MFC set to  0.000000
5/19/2012	10:07:49 PM	H2 MFC set to  0.000000
5/19/2012	10:07:49 PM	BCl3 MFC set to  0.000000
5/19/2012	10:07:49 PM	PH3 MFC set to  0.000000
5/19/2012	10:07:49 PM	SiCl4 MFC set to  0.000000
5/19/2012	10:07:50 PM	Tube furnace set to 0
5/19/2012	10:23:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2012	10:23:37 PM	Recipe started at 10:23 PM
5/19/2012	10:23:37 PM	Helium valve closed
5/19/2012	10:23:37 PM	H2 valve closed
5/19/2012	10:23:38 PM	BCl3 valve closed
5/19/2012	10:23:38 PM	PH3 valve closed
5/19/2012	10:23:38 PM	SiCl4 pre valve closed
5/19/2012	10:23:38 PM	SiCl4 post valve closed
5/19/2012	10:23:38 PM	Main Vac valve closed
5/19/2012	10:23:38 PM	Bubbler valve closed
5/19/2012	10:23:38 PM	Bypass valve opened
5/19/2012	10:23:38 PM	Helium MFC set to  0.000000
5/19/2012	10:23:38 PM	H2 MFC set to  0.000000
5/19/2012	10:23:38 PM	BCl3 MFC set to  0.000000
5/19/2012	10:23:38 PM	PH3 MFC set to  0.000000
5/19/2012	10:23:38 PM	SiCl4 MFC set to  0.000000
5/19/2012	10:23:38 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	10:23:38 PM	Tube furnace set to 0
5/19/2012	10:24:29 PM	Helium valve closed
5/19/2012	10:24:29 PM	H2 valve closed
5/19/2012	10:24:29 PM	BCl3 valve closed
5/19/2012	10:24:29 PM	PH3 valve closed
5/19/2012	10:24:29 PM	SiCl4 pre valve closed
5/19/2012	10:24:29 PM	SiCl4 post valve closed
5/19/2012	10:24:29 PM	Main Vac valve closed
5/19/2012	10:24:29 PM	Bubbler valve closed
5/19/2012	10:24:29 PM	Bypass valve opened
5/19/2012	10:24:29 PM	Helium MFC set to  0.000000
5/19/2012	10:24:29 PM	H2 MFC set to  0.000000
5/19/2012	10:24:29 PM	BCl3 MFC set to  0.000000
5/19/2012	10:24:29 PM	PH3 MFC set to  0.000000
5/19/2012	10:24:29 PM	SiCl4 MFC set to  0.000000
5/19/2012	10:24:29 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	10:24:29 PM	Tube furnace set to 0
5/19/2012	10:24:38 PM	Helium valve closed
5/19/2012	10:24:38 PM	H2 valve closed
5/19/2012	10:24:38 PM	BCl3 valve closed
5/19/2012	10:24:38 PM	PH3 valve closed
5/19/2012	10:24:38 PM	SiCl4 pre valve closed
5/19/2012	10:24:38 PM	SiCl4 post valve closed
5/19/2012	10:24:38 PM	Bypass valve closed
5/19/2012	10:24:38 PM	Bubbler valve closed
5/19/2012	10:24:38 PM	Main Vac valve opened
5/19/2012	10:24:38 PM	Helium MFC set to  0.000000
5/19/2012	10:24:38 PM	H2 MFC set to  0.000000
5/19/2012	10:24:38 PM	BCl3 MFC set to  0.000000
5/19/2012	10:24:38 PM	PH3 MFC set to  0.000000
5/19/2012	10:24:38 PM	SiCl4 MFC set to  0.000000
5/19/2012	10:24:38 PM	Bypass solenoid MFC set to  0.000000
5/19/2012	10:24:38 PM	Tube furnace set to 0
5/19/2012	10:24:39 PM	Run finished at 10:24 PM
5/19/2012	10:24:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
